Unravelling the relationships between defects and material properties is a daunting task, but increased analysis and knowledge could be beneficial in many applications. Solid inorganic materials ...

During 7nm gate poly removal process, polysilicon is removed exposing both NFET and PFET fins in preparation for high-k gate oxide. If the polysilicon etch is too aggressive or the source and drain ...

The concept of zero defect manufacturing has been around for decades, arising first in the aerospace and defense industry. Since then, this manufacturing approach has been adopted by the automotive ...

The size and performance advantages of FinFETs are leading to a general industry adoption of these 3D transistors at the more advanced technology nodes. These complex transistors, however, exacerbate ...